High teperature high frequency dynamic/static pressure transducer, MEMS pressure sensor P81

SensStar deign and provide P81 series pressure transducer, P81 high frequency response pressure sensor utilizes the excellent elastic mechanical properties of silicon, adopts micromachining technology, flush packaging structure, and integrated silicon diaphragm sensing element. Its effective size is small, its dynamic frequency response is extremely high (up to 1MHz), and it can obtain broadband response as low as zero frequency and as high as close to natural frequency, and it has rise time as low as microseconds, Its comprehensive performance is better than that of piezoelectric dynamic pressure sensor. This series of products are suitable for military engineering, chemical explosion test, petroleum exploration and logging, materials, mechanics, civil engineering, geotechnical mechanics, trauma medicine, hydraulic power mechanical test and other scientific tests and modern instruments, and are the first choice for dynamic pressure waveform measurement. Its performance index has reached the international advanced level, which can completely replace the similar foreign products. Optional pen style shock wave pressure sensor.

-MEMS pressure sensitive devices based on SOI

-Flush package, good dynamic characteristics

-Wide range of pressure measurement

-Good long-term stability

Specfication

Dynamic Frequency response	up to 1MHz, 10KHz , 50KHz,100KHz,200KHz available
measure medium	Various liquids or gases compatible with silicon, stainless steel and glass
Pressure Range	0～10KPa……60MPa
Nonlinearity	0.05%FS			0.15%FS	0.3%FS	0.5%FS
Hysteresis, Repeatability	0.03%FS			0.1%FS	0.2%FS	0.3%FS
Accuracy	0.1%FS			0.2%FS	0.5%FS（典型）	1%FS
Applied Pressure (proof)	≥200%FS
Long term stability	better than 0.2%FS/Year
Electrical
Full scale output	80mV±20mV
Zero output	≤±2mV
Power supply	1.5mA，5mA或9V
Connect	M20, 1/4NPT, Self locking structure
insulation resistance	100MΩ(50VDC)
Environmental
zero temperature			0.03%FS/℃ (typical)
Sensitivity temperature coefficient			0.03%FS/℃ (typical)
Compensation temperature			0～70℃	-25～50℃	25～125℃	25～175℃
Storage			-40℃～125℃
Humidity			0%～85% RH
Structure
Pressure Connect		M20×1.5，M12×1，others
Materials		1Cr18Ni9TI
Weight		< 150g